Hotline: +86181-5249-8356 Mr. Wang
Enterprise email：michael@trygoal.cn
Company Headquarters: Room J, Room 1_203, 337 Shahe Road, Jiangqiao Town, Jiading District, Shanghai
Ningxia Factory: Building 16, East Zone, Nuanquan Longxiang New Material Incubation Park, Helan Industrial Park, Ningxia
Item | Description |
Heater Size | 200mm/300mm |
Number of heating controlled zone | Single zone heater/lDual zone heater |
ESC function |
Monopolar ESC/Bipolar ESC/Bipolar ESC |
Heater Temperature | ≥450℃/≥550℃/≥650℃ |
Temperature uniformity | ±1%-1.5% |
Shaft leak rate at bonding portion | ＜5e-9Pa m3/s (at RT) |
Heating rate | Heating and cooling process ＜5℃/min |
Technical support：Zhongke Jialian | Website Backend
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